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E. Fjeld Company
3 Executive Park Drive
North Billerica, MA 01862
USA
Phone: (978) 667-1416
Fax: (978) 667-9059
email: sales@efjeld.com
Web: www.efjeld.com |

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70mm
x 90mm 5-Axis Cartesian Stage |
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UST -
5500 |
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Ultra
Smooth
Translation |
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Description |
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The UST-5500 has been designed by the E. Fjeld
Company as a direct replacement stage for the Hitachi S-4000
series Field Emission Scanning Electron Microscope (FE-SEMs).
The
stage and drive electronics of the UST-5500 incorporate advanced technologies to
enable high resolution imaging and smooth motion at high
magnifications.
Conventional designs utilize comparatively large step-sizes and
non-optimal drive methods, that cause the SEM image to
"jump" at very high magnifications and slow
speeds. Many users resort to using the SEM's electronic
"Beam" or "Image" shift, which may introduce
problems such as beam distortion, image shift run-out (inability
to further deflect the beam), and loss of sample addressability
(inability to determine exactly where the beam is striking the
sample). The UST-5500 overcomes these limitations by
allowing accurate positioning, smooth motion, and slow speeds at
high magnifications, all without using image shift.
The
UST-5500 is beneficial in many applications, including:
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Locating
and imaging specific DRAM cells in the semiconductor industry
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Examining
critical surfaces of medical devices for stress and
fractures
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Imaging
defects and contamination for X-ray analysis
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UST-5500
Ultra Smooth Motion stage for Hitachi SEMs |
High resolution stepping motors on all axes (X, Y,
Z, T and R) of the UST-5500 specimen stage.
The Y, Z, T and R motors are internally mounted and vacuum
prepped by E. Fjeld Co. The
X motor is mounted externally and directly coupled to the drive
mechanics of the stage. Other
features include:
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BNC
ground connector for beam current measurement |
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Optical
reference sensors for maximum reliability |
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Teflon®
wiring for durability and vacuum compatibility |
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| Stage Limits of Motion |
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X : 0 - 95 mm |
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Y : 0 - 70 mm |
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Z : 0 - 30 mm |
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TILT
: -5 to +90 Degrees |
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ROTATION
: 360 Degrees Continuous |
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| Advanced Microstepping Motor
Drive |
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Configured
to drive the five axis UST-5500 stage |
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Ultra
smooth stage motion at high magnification |
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Low
EMI design prevents electron beam interference |
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| Display and Joystick Features |
Display:
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Coordinate readout of
all axes positions and status (referencing, in motion, etc) |
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Indicates
currently selected axes and speed ranges |
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Thin film
electro-luminescent display with 160 degree viewing angle |
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Quarter VGA (320 x 240) display size |
Joystick:
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Complete
five axis joystick control, drive 3 axes simultaneously |
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Joystick-selectable
variable speed ranges |
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Convenient
LOAD button returns stage to the sample exchange position |
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5
Pushbuttons - Reference, Load, Speed range up/down, Axes select |
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| Stage Lock |
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"Set Once" stage lock features no motion
limiting or settling time |
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All axes are free to be driven while
the lock is engaged |
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| Quality Assurance |
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Stage
and Electronics undergo rigorous cycle testing |
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All
vacuum components are helium leak checked to current industry
standards |
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Stages
are transported in a vacuum vessel to minimize contamination during
shipping |
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| Also Available: Coordinate
Storage Software |
Software package designed for storage and recall
of axis coordinates. Allows several different modes of
addressing, including absolute, offset absolute, and relative.
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Additional
Images For UST - 5500 |
Copyright © 2003 E. Fjeld Company, Inc
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