|
The UST-5800 has been designed by the E.
Fjeld Company as a direct replacement stage for the
Hitachi S-4800 series Field Emission Scanning Electron
Microscope (FE-SEMs).
The stage and drive electronics of the
UST-5800 incorporate advanced technologies to enable
high resolution imaging and smooth motion at high
magnifications.
Conventional designs utilize comparatively large
step-sizes and non-optimal drive methods, that cause the
SEM image to "jump" at very high magnifications and slow
speeds. Many users resort to using the SEM's
electronic "Beam" or "Image" shift, which may introduce
problems such as beam distortion, image shift run-out
(inability to further deflect the beam), and loss of
sample addressibility (inability to determine exactly
where the beam is striking the sample). The
UST-5800 overcomes these limitations by allowing
accurate positioning, smooth motion, and slow speeds at
high magnifications, all without using image shift.
The UST-5800 is
beneficial in many applications, including:
 |
Locating and imaging
specific DRAM cells in the semiconductor industry |
|
Examining critical
surfaces of medical devices for stress and fractures |
|
Imaging defects and
contamination for X-ray analysis |
|
 |
UST- 5800
Ultra Smooth Motion stage for Hitachi SEMs |
High resolution stepping
motors on all axes (X, Y, Z, T and R) of the UST-5800
specimen stage.
All motors are internally mounted and vacuum
prepped by E. Fjeld Co.
Other features include:
|
BNC ground connector for beam current measurement |
|
Optical reference sensors for maximum reliability |
|
Teflon® wiring for durability and vacuum compatibility |
|
|
 |
|
|
| Stage Limits of
Motion |
|
X :
0 - 105 mm |
|
Y :
0 - 90 mm |
|
Z :
0 - 30 mm |
|
TILT
: -5 to +90 Degrees |
|
ROTATION
: 360 Degrees Continuous |
|
|
|
|
|
| Advanced
Microstepping Motor Drive |
|
Configured to drive the five axis UST-5800 stage |
|
Ultra smooth stage motion at high magnification |
|
Low EMI design prevents electron beam interference |
|
|
|
|
|
| Display and Joystick
Features |
Display:
|
Coordinate readout of all axes positions and status
(referencing, in motion, etc) |
|
Indicates currently selected axes and speed ranges |
|
Thin film electro-luminescent display with 160 degree
viewing angle |
|
Quarter VGA (320 x 240) display size |
Joystick:
|
Complete five axis joystick control, drive 3 axes
simultaneously |
|
Joystick-selectable variable speed ranges |
|
Convenient LOAD button returns stage to the sample
exchange position |
|
5 Pushbuttons - Reference, Load, Speed range up/down,
Axes select |
|
|
 |
|
|
| Stage Lock |
|
"Set Once" stage lock features no motion limiting or
settling time |
|
All axes are free to be driven while the lock is
engaged |
|
|
 |
|
|
| Quality Assurance |
|
Stage and Electronics undergo rigorous cycle testing |
|
All vacuum components are helium leak checked to
current industry standards |
|
Stages are transported in a vacuum vessel to minimize
contamination during shipping |
|
|
|
|
|
| Also Available:
Coordinate Storage Software |
Software package designed for
storage and recall
of axis coordinates. Allows several different
modes of addressing, including absolute, offset
absolute, and relative. |
|
 |
|
|
