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E. Fjeld Company
3 Executive Park Drive
North Billerica, MA 01862
USA
Phone: (978) 667-1416
Fax: (978) 667-9059
email: sales@efjeld.com
Web: www.efjeld.com |

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100mm
Rapid Exchange System |
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RES A-100 |
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Description |
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| The Rapid Exchange System (RES)
A-100 and A-200 autoloaders allow convenient, automatic sample
exchanges while keeping the SEM or FIB host tool under vacuum,
greatly reducing pumping time and host tool contamination.
A simple, single-button interface is used to initiate sample
exchanges, while five LEDs indicate the current autoloader
status. A pincer switch, conveniently located internal to the
autoloader, is used to manually actuate the carrier pincers when
the user is exchanging samples on the transfer arm. |
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| 100mm
Automatic Airlock - General |
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Accepts
sample sizes up to 101 mm (4 inches) in diameter easily, quickly and safely |
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Top-mounted
sample viewing window permits sample
inspection while in vacuum |
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Interfaces
to tool via integrated motorized gate valve |
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Highly
accurate motorized lead-screw insertion arm assures reliable,
repeatable sample loading |
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Windows™-based
utilities software provided for system setup / diagnostics |
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| Safety
features |
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Redundant
safety interlocks in both software and hardware prevent unsafe
autoloader operation |
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User
interlock allows the Host tool to block autoloader operation in unsafe or
undesirable conditions |
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Vacuum
interlock prevents gate valve opening unless under vacuum |
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Sample
carrier sensors on both Host tool and Autoloader transfer arm
assure safe recovery in case of power failure |
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Pincer
sensors prevent operation if it is detected that the carrier
is not properly engaged with the transfer arm |
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Other
interlocks include Gate valve Open / Closed, Drawer open, Arm
retracted, Arm extension limit |
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| Exchanges |
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Exchanges
performed under vacuum, reducing host tool pump down time and
contamination |
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"Quick
Fit" dovetail design on sample holder allows automatic sample
exchanges, yet holds samples securely |
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Internal
airlock surfaces are highly polished and nickel plated to
reduce pump-down time |
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| Options |
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Optional
sample holders available, including single-sample,
multi-sample, wafer, and custom |
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Available
vacuum pumps include conventional roughing, Scroll, and Turbo
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Quality Assurance |
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All
equipment undergo rigorous inspection and testing |
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All
vacuum components are helium leak checked to current industry
standards |
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Factory
integrated to ensure product specification compliance |
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Additional
Images For RES A100 |
Copyright © 2003 E. Fjeld Company, Inc
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