Accepts sample sizes up to 200 mm in diameter easily, quickly and safely

Top-mounted sample viewing window permits sample inspection while in vacuum

Interfaces to tool via industry standard VAT® valve

Highly accurate motorized lead-screw insertion arm assures reliable, repeatable sample loading

Windows™-based utilities software provided for system setup / diagnostics

Redundant safety interlocks in both software and hardware prevent unsafe autoloader operation

User interlock allows the Host tool to block autoloader operation in unsafe or undesirable conditions

Vacuum interlock prevents gate valve opening unless under vacuum

Sample carrier sensors on both Host tool and Autoloader transfer arm assure safe recovery in case of power failure

Pincer sensors prevent operation if it is detected that the carrier is not properly engaged with the transfer arm

Other interlocks include VAT® valve Open / Closed, Drawer open, Arm retracted, Arm extension limit 

Exchanges performed under vacuum, reducing host tool pump down time and contamination

"Quick Fit" dovetail design on sample holder allows automatic sample exchanges, yet holds samples securely

Internal airlock surfaces are highly polished and nickel plated to reduce pump-down time

Optional sample holders available, including single-sample, multi-sample, wafer, and custom

Available vacuum pumps include conventional roughing, Scroll, and Turbo
 

All equipment undergo rigorous inspection and testing

All vacuum components are helium leak checked to current industry standards

Factory integrated to ensure product specification compliance