The
Gemini Eucentric stage has been designed by the E. Fjeld
Company for the LEO 1500 Field Emission series and
Focused Ion Beam instruments
The Gemini Eucentric
stage is beneficial in many applications, including:
Locating and imaging
specific DRAM cells in the semiconductor industry
Examining critical
surfaces of medical devices for stress and fractures
Imaging defects and
contamination for X-ray analysis
Stable platform for FIB (Focused Ion Beam) operations
Electron-beam lithography and
electron backscatter diffraction (EBSD)
The six-axis version of the Gemini stage
features a unique,
variable eucentric working distance by
incorporating a
motorized Z prime axis, which allows the sample height to be
adjusted perpendicular to the tilt plane while under vacuum. This advanced
design enables a variety of sample heights to be placed
precisely at the
center of the tilt axis of the stage, allowing the sample to be
tilted with minimal image shift.
Gemini 5 / 6
axis stage
High resolution stepping
motors on all axes of the specimen stage.
All motors are internally mounted and vacuum
prepped by E. Fjeld Co.
Other features include:
Specimen ground connector for beam current measurement
Optical reference sensors for maximum reliability
Teflon® wiring for durability and vacuum compatibility
Stage
Translation
X : 0 - 100 mm
Y : 0 - 100 mm
Rotation
: 360 Degrees Continuous
Z : 0 - 43 mm
Tilt: -10 to +60 Degrees
Z prime : 0 - 10 mm
Quality Assurance
Stage and Electronics undergo rigorous cycle testing
All vacuum components are helium leak checked to
current industry standards
Stages are transported in a vacuum vessel to minimize
contamination during shipping
Also Available:
Coordinate Storage Software
Software package designed for
storage and recall
of axis coordinates. Allows several different
modes of addressing, including absolute, offset
absolute, and relative.
