Accepts sample sizes up to 101.4mm (4 inches) in diameter easily, quickly and safely

Front viewing window permits excellent sample inspection while in vacuum

Interfaces to tool via integrated gate valve

Integrated illumination source facilitates sample placement onto stage 

Sample exchange rod interlock prevents gate valve operation if rod is not fully retracted

User interlock from tool prevents gate valve operation in unsafe or undesirable conditions

Vacuum interlock prevents gate valve opening unless under vacuum

Vent commands are ignored unless gate valve is closed

Three internal, indexable  sample holder stations allow multiple sample holders to be preloaded  

"Quick Fit" dovetail design on sample holder allows quick sample exchanges, yet hold samples securely

Internal airlock surfaces are highly polished and nickel plated to reduce pump-down time

Optional sample holders available, including single-sample, multi-sample, wafer, and custom

Available vacuum pumps include conventional roughing, Scroll, and Turbo
 

All equipment undergo rigorous inspection and testing

All vacuum components are helium leak checked to current industry standards

Factory integrated to ensure product specification compliance