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E. Fjeld Company
3 Executive Park Drive
North Billerica, MA 01862
USA
Phone: (978) 667-1416
Fax: (978) 667-9059
email: sales@efjeld.com
Web: www.efjeld.com |

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M-200 |
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Description |
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| The E. Fjeld 200mm manual
Airlock has been designed to allow the user to quickly and
easily transfer samples to the imaging stage. |
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200mm Manual Airlock - General |
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Accepts
sample sizes up to 204mm (8 inches) by 47 mm (1 3/4 inches)
high easily, quickly and safely |
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Two
viewing windows (top and front) permit excellent sample
inspection while in vacuum |
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Interfaces
to tool via industry standard VAT® valve |
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Safety features |
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Sample
exchange rod interlock prevents gate (VAT®) valve operation if
rod is not fully retracted |
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User
interlock from tool prevents gate valve operation in unsafe or
undesirable conditions |
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Vacuum
interlock prevents gate valve opening unless under vacuum |
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Vent
commands are ignored unless gate valve is closed |
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Sample Throughput |
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Three
internal, indexable sample holder stations allow
multiple sample holders to be preloaded, further reducing
pumping / venting delays |
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"Quick
Fit" dovetail design on sample holder allows quick sample
exchanges, yet hold samples securely |
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Internal
airlock surfaces are highly polished and nickel plated to
reduce pump-down time |
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Options |
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Optional sample holders available, including
single-sample, multi-sample, wafer, and custom |
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Available vacuum pumps include conventional roughing,
Scroll, and Turbo
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Quality
Assurance |
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All equipment undergo rigorous
inspection and testing |
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All vacuum components are helium
leak checked to current industry standards |
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Factory integrated to ensure
product specification compliance |
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Additional
Images For M-200 |
Copyright © 2003 E. Fjeld Company, Inc
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